Processing and Characterization of Monolithic Passive-Matrix GaN-Based MicroLED Arrays With Pixel Sizes From 5 to 50 µm

MicroLED arrays with the capability of switching each pixel separately high frequency can serve as structured micro-illumination light engines for applications in sensing, optogenetics, microscopy and many others. We describe a scalable chip process chain fabrication passive-matrix microLED arrays, which were integrated PCB-based driving electronics. The produced by deep-etching conventional planar LED structures on sapphire, followed filling planarization steps. resolution lies range 254 to 2540 pixels-per-inch (ppi), consist 32 x pixels. Optical output powers up 50 µW per measured. In comparison CMOS-based approaches, presented technology is simplified strategy produce counts.